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Greenhouse Abatement in the Semiconductor Industry
The manufacture of semiconductors requires the use of perfluorinated compounds (PFCs), namely C2F6, CF4, NF3, and SF6, which contribute to global warming. According to data from 2015, the semiconductor industry only accounts for about 0.18% of the total greenhouse emissions from US industrial sectors. Nevertheless, the semiconductor industry is taking steps to reduce its emissions to mitigate the effects of global warming.
Between 2001 and 2015, the US semiconductor reduced its energy usage by 34% in its manufacturing operations, but many companies plan to decrease their energy usage in the coming years further. This article will detail what PFCs are, why they're harmful greenhouse gases, what actions are being taken to reduce emissions and the future of the industry.
The manufacture of semiconductors requires the use of perfluorinated compounds (PFCs), namely C2F6, CF4, NF3, and SF6, which contribute to global warming. According to data from 2015, the semiconductor industry only accounts for about 0.18% of the total greenhouse emissions from US industrial sectors. Nevertheless, the semiconductor industry is taking steps to reduce its emissions to mitigate the effects of global warming.
Between 2001 and 2015, the US semiconductor reduced its energy usage by 34% in its manufacturing operations, but many companies plan to decrease their energy usage in the coming years further. This article will detail what PFCs are, why they're harmful greenhouse gases, what actions are being taken to reduce emissions and the future of the industry.
| Compound |
Atmospheric Lifetime (years)* |
Global Potential (100 years)* |
Decomposition Temperature |
| CF4 | 50,000 | 7,390 | >1,200°C |
| C2F6 | 10,000 | 12,200 | 1,000~1,200°C |
| SF6 | 3,300 | 22,800 | 1,000~1,200°C |
| c-C4F8 | 3,200 | 10,300 | <1,000°C |
| C3F8 | 2,600 | 8,830 | <1,000°C |
| NF3 | 740 | 17,200 | <900°C |
| CHF3 | 270 | 11,700 | <900°C |
* Source: https://www.epa.gov
What Are PFCs?
PFCs are greenhouse gases that contribute to global warming and break down very slowly in the atmosphere. Many experts and environmentalists characterize PFCs as ‘persistent.’ Although such gases are required to manufacture semiconductors – which are arguably the fundamental driving force behind advancements such as information communications technologies (ICT) and modern electronics – they’re also prevalent in a wide range of manufacturing industries, from aerospace and automotive to construction and electronics. They also have a broad range of uses, including making non-stick cookware to waterproofing clothes and mattresses.
Reporting on PFC Emissions by the US Semiconductor Industry
Even though the semiconductor sector now must report its annual PFC emissions according to US federal law, it started doing so voluntarily during the 1990s when leading companies within the industry started making a concerted effort to reduce their emissions.
In addition to the efforts made by the semiconductor industry in the US, the World Semiconductor Council (WSC), which is an international forum made up of industry leaders from Korea, Europe, China, the US and Chinese Taipei, was established with a long-term goal to reduce its emissions of PFCs. The WSC aimed to reduce its emissions by 10% by 2010. In 2011, it reported a 32% reduction, far surpassing its goal.
How Is the Semiconductor Industry Abating Its PFC Emissions?
The semiconductor manufacturing sector is continuously innovating to enhance the efficiency of its solutions. Overall, the industry invests nearly a fifth of its total revenue into research and development. As a result, between 2001 and 2015, the US semiconductor industry has reduced its energy consumption regarding manufacturing by 34%. Companies are also developing semiconductors that are increasingly powerful while requiring less energy to perform.
New technological innovations are also occurring in the world of gas abatement. Combustion and Plasma destruction has primarily been responsible for impressive levels of PFC emission reductions while the performance and quantity of semiconductors are increasing. The main techniques for gas abatement include the following, either individually or in combination:
PFC Abatement Systems by BAZM
BAZM is a leading developer of abatement systems that can reduce or abate greenhouse gases within the solar and semiconductor industries. Currently, our most efficient and cost-effective solutions include:
PFCs are greenhouse gases that contribute to global warming and break down very slowly in the atmosphere. Many experts and environmentalists characterize PFCs as ‘persistent.’ Although such gases are required to manufacture semiconductors – which are arguably the fundamental driving force behind advancements such as information communications technologies (ICT) and modern electronics – they’re also prevalent in a wide range of manufacturing industries, from aerospace and automotive to construction and electronics. They also have a broad range of uses, including making non-stick cookware to waterproofing clothes and mattresses.
Reporting on PFC Emissions by the US Semiconductor Industry
Even though the semiconductor sector now must report its annual PFC emissions according to US federal law, it started doing so voluntarily during the 1990s when leading companies within the industry started making a concerted effort to reduce their emissions.
In addition to the efforts made by the semiconductor industry in the US, the World Semiconductor Council (WSC), which is an international forum made up of industry leaders from Korea, Europe, China, the US and Chinese Taipei, was established with a long-term goal to reduce its emissions of PFCs. The WSC aimed to reduce its emissions by 10% by 2010. In 2011, it reported a 32% reduction, far surpassing its goal.
How Is the Semiconductor Industry Abating Its PFC Emissions?
The semiconductor manufacturing sector is continuously innovating to enhance the efficiency of its solutions. Overall, the industry invests nearly a fifth of its total revenue into research and development. As a result, between 2001 and 2015, the US semiconductor industry has reduced its energy consumption regarding manufacturing by 34%. Companies are also developing semiconductors that are increasingly powerful while requiring less energy to perform.
New technological innovations are also occurring in the world of gas abatement. Combustion and Plasma destruction has primarily been responsible for impressive levels of PFC emission reductions while the performance and quantity of semiconductors are increasing. The main techniques for gas abatement include the following, either individually or in combination:
- Combustion
- Thermal
- Chemical conversion
- Plasma
- Catalytic
- Water reaction
PFC Abatement Systems by BAZM
BAZM is a leading developer of abatement systems that can reduce or abate greenhouse gases within the solar and semiconductor industries. Currently, our most efficient and cost-effective solutions include:
- The GST Suite of technologies
- GAIA - Combustion for high flows
- Gallant - Combustion for large substrates, e.g., solar
- Durian - Plasma
- Dragon - Combustion
- SWS & Aqua - Water
- SDS - Chemical
- Used & Refurbished
- Delatech CDO - Thermal
- Vector - Water
- Guardian – Combustion
- Edwards, Techarmonic, etc.
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