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Refurbished Gas Abatement Systems
BAZM Solutions specializes in Refurbishing the ECOSYS product line. All refurbishment is done in the U.S.A. Below are samples of our inventory units available at this time.
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VECTOR 3000/3500 RELIABLE AND EFFICIENT WATER SCRUBBER
The Vector water scrubber was originally developed for gas abatement of Epi applications. After several product enhancements, the Vector differentiated itself from the competition when abating acids in metal etch applications with its self cleaning entries. The uptime benefits of the self cleaning entry facilitated the Vector Ultra to dominant point of use water scrubber in the semiconductor industry. 10+ Available Vector Water Scrubber Specification Vector Water Scrubber Specification (PDF Format) |
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VECTOR SI RELIABLE AND EFFICIENT WATER SCRUBBER
A water scrubber had never been viable for a CVD application until the Vector Si was developed with Novellus for SiN applications. Now there was a low energy, non-fuel method of abating the SiN gases. The gas abatement system benefited from all the reliability designed into the Vector, coupled with the oxidizing entry for silane treatment. 5+ Available [Photo of Vector SI Reliable and Efficient Water Scrubber] [Datasheet] |
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VECTOR 6000
A water scrubber had never been viable for a CVD application until the Vector Si was developed with Novellus for SiN applications. Now there was a low energy, non-fuel method of abating the SiN gases. The gas abatement system benefited from all the reliability designed into the Vector, coupled with the oxidizing entry for silane treatment. The Vector 6000 is a multi-entry version of the Vector Si. 3 Available [Datasheet] |
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GUARDIAN GS4 & GS8 GAS ABATEMENT SYSTEM
The GS4 & GS8 burn boxes are the industry standard for reliable, thermal oxidation and combustion of flammable and pyrophoric process gases and by-products. The Guardian gas abatement systems have an active flame front that is maintained with either hydrogen or methane fuel. Air enters the chamber creating a swirling action for efficient air and process gas mixing and post combustion cooling. As the combustion chamber is air-cooled, it eliminates the need for water cooling. Call for technical advice or pricing on a new or refurbished Guardian Gas Abatement System. 20+ units available Guardian GS4 & GS8 Specification Guardian GS4 & GS8 Specification (PDF Format) [Photo of Guardian GS4 and GS8] |
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DELATECH CDO GAS ABATEMENT SYSTEM
The CDO burn/wet gas abatement system was the first in the industry to combine and integrate thermal and wet treatment systems into a single system. Combining abatement technologies allowed the CDO to dominate the industry for decades given its ability to abate a broad range of gases including abatement of pyrophoric, corrosive, flammable and particulate generating process recipes. The CDO 863 is the latest model in this product line and includes reagent addition to counter the fluorine attack from NF3 plasma cleans. 10+ Available Delatech CDO Requirements Delatech CDO Requirements (PDF Format) [Photo of CDO] |
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NOVAPURE
ATMI developed the Novapure dry scrubber for several target needs: (1) low water use fabs, (2) highly toxic applications, (3) R&D facilities without a house scrubber so needed a level of abatement higher than 99% destruction removal efficiency (DRE). With the selection of suitable absorbent media, a dry scrubber can be used for many semiconductor applications. However, the cost of ownership can be higher than a water scrubber and frequently operating cost is the final decision making factor by the end-users. [Photo of Novapure] |
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MARATHON
THE INDUSTRY STANDARD FOR BURN-WET TREATMENT APPLICATIONS The Marathon was the first high capacity burn/wet system to be brought to the semiconductor industry. The higher capacity was designed in to make it suitable for solar applications. We rarely carry this model due as less complex, and less costly, alternatives are available. [Datasheet] [Marathon Parts] |
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EDWARDS HELIOS
BOC Edwards advanced solution for the abatement of high hydrogen flows using proven inward fired combustion. This system incorporates modifications from the base model Edwards TPU to facilitate handling both toxic and carrier gases from Low Pressure Epitaxy and MOCVD with high hydrogen flows. [Photo of Edwards Helios] |
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EDWARDS KRONIS
Like the Edwards Helios, the Edwards Kronis is also based on the Edwards TPU. In this case the target applications were Low-K. This required an enhanced drainage system to adequately move the substantial amount of particulate generated by the low-K gases. [Photo of Edwards Kronis] |
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EBARA PURE AIR S.DOC
This simple yet effective system is designed for pyrophoric gas abatement. The dynamic oxidation relies on the pyrophoric properties of gases like silane. Perhaps the cost effective abatement solution for pyrophoric gas abatement as fuel is not required to ignite the gas flow. Without an active flame, the DRE is stated in terms of the lower flammable limit of the pyrophoric gas being abated. [Photo of Ebara Pure Air S.Doc] |
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TECHARMONIC MOJAVE
The TecHarmonic Mojave dry scrubber is designed to abate toxic and corrosive gas by-products present in the effluent streams of a variety of semiconductor processes. This system is much like the Novapure and provides the customer with a highly effective "PoU" (point of use) abatement tool that scrubs to threshold limit values (TLV). [Photo of Techarmonic Mojave] |
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AIRGARD
Airgard engineers had a goal to develop the most efficient and reliable Epi scrubbers available. They combined inlet device technology with a PLC based control box and automated gas inlet plunger too produce a low maintenance Epi scrubber. This performance results in higher uptime, process stability and increased safety. The Airgard scrubber combines 2 spray chambers and a packed column to produce some of the highest efficiencies in the industry. [Photo of Airgard] |
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