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Vector 3000/3500 Reliable And Efficient Water Scrubber
When selecting a water scrubber, it does not matter whether you call it a wet scrubber, a water scrubber, or a gas abatement system, the most important aspects are reliability and performance. How well can it remove the target gases from the gas stream? How much maintenance will be required?
Our customers do not want the process tool to be off-line due to a piece of support equipment. The Vector has been the water scrubber of choice for the semiconductor and solar industries for decades and is still available today with modern upgrades such as self cleaning entries, magnetically coupled pumps and high efficiency motors.
When the reliability and performance of a Vector gas abatement system is combined with the expertise and support of BAZM our customers get the satisfaction of a proven combination.
Originally, the Vector wet scrubber was designed solely for Epitaxial applications with a single large diameter packed bed. The addition of multiple inlets and a polishing column expanded its performance into Metal etch acid scrubbing applications. The polishing column enabled the acids to be scrubber to 99% destruction and removal efficiency. The Vectors flexibility was further enhanced with the addition of a silane oxidizing entry for CVD abatement.
The 3000 is a proven solution for a variety of processes including Etch and Epi with data to support its performance.
The 3500 is a proven solution for Metal Etch processes. This system will treat up to four process chambers and is tailored to high particulate forming Metal Etch processes.
The 6000 has been designed to reduce pyrophoric gases to a fraction of LEL without using external fuel sources. This treatment solution can be configured to safely treat up to three pyrophoric–containing effluent streams using a controlled addition of CDA to the inlet. These qualities make the 6000 an ideal non-fuel solution for solar applications.
| Vector Water Scrubber
Specifications |
|||
| 3000 | |||
| • Process Flow 1–4 inlets | |||
| System maximum flow | 300 slm (10.6 scfm) | ||
| Special circumstances maximum flow | 2,265 slm (80scfm) | ||
| • Compressed Gas | |||
| Nitrogen per inlet | 14 slm (0.5 scfm) | ||
| • Water Consumption | |||
| Fresh Water | 0.5 to 4.0 gpm (1.9 to 15.2 slm) | ||
| • Power Consumption | |||
| Wattage | 1100 watts | ||
| • Reliability | |||
| MTBF | > 8,000 hours | ||
| MTTR | < 2 hours | ||
| 3500 | |||
| • Process Flow 1–4 inlets | |||
| System maximum flow | 300 slm (10.6 scfm) | ||
| Special circumstances maximum flow | 2,265 slm (80scfm) | ||
| • Compressed Gas | |||
| Nitrogen per inlet | 25 slm (1 scfm) | ||
| • Water Consumption | |||
| Fresh Water | 0.5 to 4.0 gpm (1.9 to 15.2 slm) | ||
| • Power Consumption | |||
| Wattage | 1100 watts | ||
| • Reliability | |||
| MTBF | > 8,000 hours | ||
| MTTR | < 2 hours | ||
| 6000 | |||
| • Process Flow 1–3 inlets | |||
| Total flow per inlet | 75 slm (3 scfm) | ||
| Total Pyrophoric Flow | 2 slm (0.1 scfm) | ||
| • Compressed Gas per inlet | |||
| Nitrogen | 10 slm (0.4 scfm) | ||
| Clean Dry Air (CDA) | 62 slm (2.2 scfm) | ||
| • Water Consumption | |||
| Fresh Water | 0.3 gpm (1.1 slm) | ||
| Chilled Water | 2 gpm (19 slm) | ||
| • Power Consumption | |||
| Wattage | 1100 watts | ||
| • Reliability | |||
| MTBF | > 8,000 hours | ||
| MTTR | < 2 hours | ||
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