New GST Gas Abatement Systems

GST offers a complete suite of innovative abatement systems for the semiconductor industry, including Burner, Resin, Catalyst, Plasma, etc. GST innovations include a unique dual-stage combustion reactor for Dragon "Burn-Wet" scrubber. [Introduction to GST]

		SDS The SDS Series offers a safe, efficient and reliable solution for treatment of hydride and acid gases. This unique system uses chemisorptive resin technology to treat process gases in a negative pressure environment ensuring only inbound flows. Gases are scrubbed to below TLV Levels. [Datasheet SDS1000] [Datasheet SDS Airox] [Datasheet SDS500 Twin] [Datasheet SDS500 Single]

		SWS Reliable treatment systems are critical to the productivity of advanced process tools. A treatment solution must have high uptime and be flexible enough to handle changing process and environmental needs. This SWS Series of Water Scrubbers is uniquely suited to meet these challenges.

		ISIS The ISIS Series is an advanced point-of-use integrated thermal-wet treatment system designed to provide a controlled gas conditioning environment for today's demanding semiconductor process chemistries. [Datasheet Isis 1 and 2]

		DRAGON The Dragon is an advanced, point-of-use, integrated burn-wet treatment system designed to provide a controlled gas conditioning environment for today's demanding semiconductor and flat panel display process chemistries. The system is specifically designed for excellent PFC abatement efficiency to help customers meet their environmental goals and commitments. With its advanced dual reactor chamber design and smart abatement technology, the Dragon provides superior particulate management for extended PM cycles and a cost-effective abatement solution. [Datasheet Dragon]

		AQUA EXHAUST SOLUTION FOR HIGH-VOLUME SEMICONDUCTOR MANUFACTURING APPLICATIONS The GST AQUA is a high capacity, multi-stage water scrubber, with optional chemical injection. It is suitable for high flow applications, or for smaller facilities that do not have a house water scrubber. [Datasheet Aqua]

		DURIAN DURIAN is a self-contained system designed to abate PFCS and other semiconductor process tool emissions using an integrated plasma reactor system. Process gases are cracked within the plasma reactor and water soluble gases and by-products are removed downstream in the integrated water scrubber. [Datasheet Durian]
		Talk to an Expert Today Call us at: 408-887-6132

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New GST Gas Abatement Systems

SDS
The SDS Series offers a safe, efficient and reliable solution for treatment of hydride and acid gases. This unique system uses chemisorptive resin technology to treat process gases in a negative pressure environment ensuring only inbound flows. Gases are scrubbed to below TLV Levels.

[Datasheet SDS1000]
[Datasheet SDS Airox]
[Datasheet SDS500 Twin]
[Datasheet SDS500 Single]

SWS
Reliable treatment systems are critical to the productivity of advanced process tools. A treatment solution must have high uptime and be flexible enough to handle changing process and environmental needs. This SWS Series of Water Scrubbers is uniquely suited to meet these challenges.

ISIS
The ISIS Series is an advanced point-of-use integrated thermal-wet treatment system designed to provide a controlled gas conditioning environment for today's demanding semiconductor process chemistries.

[Datasheet Isis 1 and 2]

DRAGON
The Dragon is an advanced, point-of-use, integrated burn-wet treatment system designed to provide a controlled gas conditioning environment for today's demanding semiconductor and flat panel display process chemistries. The system is specifically designed for excellent PFC abatement efficiency to help customers meet their environmental goals and commitments. With its advanced dual reactor chamber design and smart abatement technology, the Dragon provides superior particulate management for extended PM cycles and a cost-effective abatement solution.

[Datasheet Dragon]

AQUA EXHAUST SOLUTION
FOR HIGH-VOLUME SEMICONDUCTOR MANUFACTURING APPLICATIONS

The GST AQUA is a high capacity, multi-stage water scrubber, with optional chemical injection. It is suitable for high flow applications, or for smaller facilities that do not have a house water scrubber.

[Datasheet Aqua]

DURIAN
DURIAN is a self-contained system designed to abate PFCS and other semiconductor process tool emissions using an integrated plasma reactor system. Process gases are cracked within the plasma reactor and water soluble gases and by-products are removed downstream in the integrated water scrubber.

[Datasheet Durian]

Talk to an Expert Today
Call us at: 408-887-6132